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        6寸藍寶石襯底

        2018-10-29

        藍寶石晶片

        Item

        6"

        Unit

         Dimension

        Diameter:

        150 ± 0.2

        mm

        Thickness:

        1300 ± 20

        um

        Primary Flat:

        47.51.0

        mm

        Orientation

        Surface-cut:

        C plane : Tilt 0.2°±0.1° in M axis /

        ~

        Primary Flat:

        A plane : 0° ± 0.15°

        ~

        Flatness

        Bow:

         0 ~ (-10)

        um

        Warp:

         20

        um

        Total Thickness Variation (TTV):

         10

        um

        LTV

        2.5

        um

        Front side Roughness

        0.2

        nm

        Back side Roughness

        0.8-1.2

        um

        Cleanliness

        No particles and fingerprints

        ~

        4.Material Quality

        High-purity mono-crystal Al2O3

        ~

        5.Package

        Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.

        ~

        6.Trace Ability

        Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.

        ~

        7.Laser Mark

        Front or Back side

        ~


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